Abstract
As part of a development programme for the production of zirconium nitride coatings by radio-frequency sputtering of red-hot zirconium rod targets in a nitrogen atmosphere, a series of thickness and stoichiometry measurements has been performed. A variety of nuclear analysis techniques have been used in the characterisation of the coatings. Concentration depth profiles were obtained using both alpha particle and deuteron backscattering. Nitrogen depth profiles were obtained independently using the 14N(d, α)12C and 14N(d, p)15N nuclear reactions. The results of this investigation confirmed correspondence to stoichiometric ZrN and revealed the compositional uniformity of the deposited layers.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
