Abstract
A novel structure for multilayer piezoelectric PZT actuator combining the merits of high displacement/voltage sensitivity, high resonance frequency and low cost is designed. The screen printing technology is adopted to fabricate this newly designed actuator successfully. Such an actuator comprises alternatively a plurality of PZT layers and a plurality of Pd-Ag electrode layers. Under the driving voltage of 10V, a displacement value of 1.57 μa is obtained, and the corresponding resonance frequency is 56.9kHz. Only a few layers are required to construct this multilayer actuator, instead of tens or even hundreds of layers required by a conventional stacked multilayer actuator to realize a large displacement, thus the manufacturing cost can be greatly reduced.
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