Abstract

The first positive working chemically amplified photosensitive polyimide-carbon black (PSPI-CB) composite with 2,2′-bis(4-(2′-(vinyloxy)ethoxy)phenyl)propane (BPA-DEVE) as a crosslinking agent was prepared. In addition, the triphenylene vinyl ether (TP-VE) monomers 2,3-di-[(2-vinyloxy)ethoxy]triphenylene (TP-DEVE) and 2,3,6,7,10,11-hexa-[(2-vinyloxy)ethoxy]triphenylene (TP-HEVE) were used as novel CB dispersing aids as well as crosslinking agents. The photolithographic performance of TP-DEVE and TP-HEVE as crosslinking agents in the positive working PSPI and PSPI-CB composites was similar to that of BPA-DEVE. The CB dispersion ability of the crosslinking agents used in the present study was evaluated on the basis of the shading ability (optical density) and surface roughness of the PSPI-CB films. Given the same amount of crosslinking agent in the formulation of the PSPI-CB composite, the optical density and surface roughness of the corresponding PSPI-CB composite film were 1.4 and 116.0 nm for PSPI-CB-1 with BPA-DEVE, 1.7 and 78.2 nm for PSPI-CB-2 with TP-DEVE, and 1.9 and 58.4 nm for PSPI-CB-3 with TP-HEVE, respectively. The results confirm that the CB dispersion ability of these crosslinking agents decreases in the order TP-HEVE > TP-DEVE > BPA-DEVE.

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