Effect of incident deposition angle on optical properties and surface roughness of TiO2 thin films

Abstract

Optical properties, surface roughness and packing density of TiO 2 thin films are studied by obliquely deposited on K9 glass by electron beam evaporation. The surface roughness of TiO 2 thin films with different incident deposition angle is compared. The experimental results show that the transmittance increases and transmittance peak shifts to short wavelength with increasing incident deposition angle, the packing density of TiO 2 thin films decrease from 0.80 to 0.34 with incident deposition angle increasing from 0° to 75°. The surface roughness of TiO 2 thin films increase with increasing incident deposition angle. The surface roughness of TiO 2 thin films is slightly bigger than the surface roughness of K9 substrate when the incident deposition angle is 75°. When the incident deposition angle is constant, TiO 2 thin films surface roughness decrease with increase of film thickness.