Abstract

This paper attempts to prove the feasibility of a novel High Temperature Heat Flux (HTHF) sensor for gas turbine environment. Based on the latest improvement in a new type of Polymer-Derived Ceramic (PDC) material, the authors present the design and development of a HTHF sensor based on PDC material, and show that such a sensor is indeed feasible. The PDC-HTHF sensor is fabricated using newly developed polymer derived SiCN, whose conductivity is controlled by proper composition and treatment condition. Direct measurements and characterization of the relevant material properties are presented. Electrical conductivity can be varied from 0 (insulator) to 100 (ohm.cm)−1; in addition a value of 4000 ppm/°C (at 600 K) is obtained for temperature coefficient of resistance. This novel sensor is found to perform quite satisfactorily at about 1400 °C for long term as compared to conventional heat flux sensors available commercially. This type of PDC-HTHF sensor can be used in harsh environments due to its high temperature resistance and resistance to oxidation. This paper also discusses lithography as a microfabrication technique to manufacture the proposed PDC-HTHF sensor. In our current design, the sensor dimensions are 2.5mm in diameter and 250 µm thickness.

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