Abstract
Abstract— Single‐crystal‐like silicon (SLS) technology is the most cost‐effective laser‐crystallization process ever invented. The throughput of the SLS process is about two times higher than that of the conventional excimer‐laser annealing (ELA) method. In addition, the performance of the TFTs fabricated by the SLS process is among the best utilized in mass production. Various TFT‐LCDs employing SLS technology, which included a 1.02‐in. full SOG LCD using an icon display for the sub‐display of cellular phones, a 1.9‐in. qVGA TFT‐LCD with a low‐power analog interface employing a low‐voltage driving scheme, and a 3.0‐in. VGA TFT‐LCD compatible with the 480i data format without additional signal processing were developed. Because the SLS process enables us to achieve highly uniform and reliable transistors, it can be effectively utilized in the mass production of mobile TFT‐LCDs with low power consumption and enhanced image quality.
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