Abstract
ABSTRACTWe present a new design of micro-photodiodes for in-vitro tests to electrically stimulate the ganglion cells of chicken and rat retinae upon light exposure of the photodiodes. Based on amorphous silicon, our laterally series connected double-stacked micro-photodiodes provide an open circuit voltage of 2.3 volts. Photolithographic steps as well as etching procedures for patterning the back contact, the amorphous silicon layers and the front contact are described. We analyse current- voltage-measurements performed with direct contact of the metal needles of a micro-positioning system to the device's electrodes. In order to test the performance of an individual micro-photodiode in an electrolyte environment, the stimulation electrode of the device is also contacted with a micro-droplet of buffer solution. Further improvement is needed, mainly addressing the problem of long-term stability of the device in electrolyte environments.
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