Abstract
In this paper, novel micromachined coplanar waveguide(CPW) transmission lines for application in millimeter-wave circuits are proposed. Two types of transmission lines with the length of 1 cm are fabricated and the measured characteristics are compared with those of the conventional CPW transmission line. One is the elevated CPW(ECPW) transmission line and the other is the overlay CPW(OCPW) line. These transmission lines are composed of 3-µm-thick electroplated gold lines with overhanging parts. By elevating the metal lines from the substrate using micromachining technology, the conductor and substrate dielectric loss can be reduced and easily integrated with conventional monolithic microwave integrated circuits. Compared with the conventional CPW line showing 2.65 dB/cm insertion loss at 50 GHz, the loss can be reduced to 1.9 dB/cm and 1.25 dB/cm at 50 GHz in the case of the ECPW and OCPW transmission lines, respectively. Also, the OCPW transmission line shows that the insertion loss does not vary with the change of the characteristic impedance. As shown in the measured and simulated results, the insertion loss is maintained below 1.4 dB/cm over wide impedance ranges.
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