Novel Integration of Metal–Insulator–Metal (MIM) Capacitors Comprising Perovskite-type Dielectric and Cu Bottom Electrode on Low-Temperature Packaging Substrates

Abstract

In this letter, a novel integration scheme, for metal-insulator-metal capacitors comprising perovskite-type dielectrics and Cu-based bottom electrodes, has been demonstrated on low-temperature FR4 packaging substrates. Cu oxidation during dielectric deposition and postannealing is completely avoided by a dielectric-first process flow with Ti as oxygen-getter. By using evaporated barium strontium titanate as capacitor dielectric, a maximum capacitance density (~1250 nF/cm2 at 100 kHz) and moderate leakage current (< 4 times 10-5 A/cm2 at 2 V) have been achieved with rapid thermal annealing at 700degC. Higher temperature leads to dielectric degradation. Combined with advanced deposition techniques, this integration scheme enables realization of high-performance embedded capacitors that can be integrated with printed circuit board technology.