Novel inertial piezoelectric actuator with high precision and stability based on a two fixed-end beam structure

Abstract

A novel inertial piezoelectric actuator is proposed in this study to address the large vibration problem in piezoelectric actuators with a typical cantilever structure. Piezoelectric vibrators with a two fixed-end beam structure were designed as driving elements to improve the precision and stability of the proposed actuator. Simulation and experiments were performed to evaluate the vibration model of the vibrators. A series of experiments was conducted to evaluate the performance of the presented actuator with regard to its linearity, repeatability, and output stepping. Angular resolution can reach 0.453 μrad at 36 V, 40 Hz, and 600 g load. Under the conditions of 40 V, 40 Hz, and 400 g load, repeatability reaches 0.0024 mrad with a maximum deviation of 0.007 mrad. Experimental results show that the designed actuator can achieve high precision and high stability under load conditions. This novel actuator has a reference value and significance in practical applications that require microdisplacement.