Abstract
Using deep level transient spectroscopy (DLTS) on gold-doped n-type Czochralski (CZ) and float zone (FZ) silicon we observe a new gold-related acceptor level (G) with an activation energy ΔE=0.19 eV and an electron capture cross section σn=1×10−17 cm2. The center is formed after hydrogenation by etching a few microns off the sample surface using HF:HNO3 based etch. We suggest that there are (at least) two possible Au-H complex centers, one which is electrically inactive and another which gives rise to an acceptor level (ΔE=0.19 eV) in the band gap of n-type silicon. The electrically active center anneals out at 250 °C while the electrically inactive one is more stable and has been observed earlier in remote plasma hydrogenation experiments performed at 150–350 °C.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
