Abstract
A novel Floating-Low Energy Ion Gun (FLIG) delivering finely focussed low-energy ion beams for high depth-resolution analyses has been developed at SAM. The FLIG operates with Xe +, Ar + or O 2 + ion beams produced with a duoplasmatron ion source. In a first step, the ion beam is filtered by a Wien filter. The beam is then focussed and shaped in a floating column composed of three electrostatic lenses as well as several deflectors, stigmators and apertures. In a last step, the ions are decelerated to their final impact energy and positioned and/or raster-scanned on the sample area to be analysed. The gun can be operated at energies from 100 eV to 10 keV with beam currents up to several hundred nA and spot diameters in the μm range. The ion beam can be raster-scanned over areas of up to 1 mm × 1 mm on the sample surface. This paper provides a complete description of the Storing Matter FLIG (concept, ion optical calculations and experimental results).
Published Version
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