Abstract
ABi4Ti4O15 (A: alkaline earth metals) thin films were prepared on Pt-passivated Si substrates by using the precursor solution of metal alkoxides. As-deposited thin films initiated crystallization below 550°C and enhanced the crystallinity at higher temperature via rapid thermal annealing in oxygen. The crystallinity of the ABi4Ti4O15 thin films depended on the A-site cation of the alkaline earth metals but the content of the pyrochlore phase as a second phase was independent of the cation. The phase purity of BLSFs strongly depended on the crystallinity and crystallographic orientation of the Pt bottoms. The 650°C-annealed CaBi4Ti4O15 thin films on the relatively low-crystalline Pt was a single phase of the BLSFs and exhibited better ferroelectric properties.
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