Abstract

We presented a novel fabrication method of pyramidal and hemispherical polymethylmethacrylate (PMMA) microlens arrays to improve the outcoupling efficiency. Pyramidal microlens arrays were fabricated by replica molding processes using concave-pyramidal silicon molds prepared by the wet etching method. Concave-hemispherical PMMA thin film was used as a template for fabrication of the hemispherical microlens array. The concave-hemispherical PMMA template was prepared by blowing a N2 gas stream onto the thin PMMA film suspended on a silicon pedestal. A PMMA microlens arrays with hemispherical structure were fabricated by a replica molding process. The outcoupling efficiency of the hemispherical microlens array was greater than that of the pyramidal microlens array. The outcoupling efficiency of hemispherical microlens arrays with a higher contact angle was larger than that of those with lower contact angle. This indicates that, for the hemispherical microlens with larger contact angle, more light can be extracted from the OLEDs due to the decrease in the incident angle of the light at the interface between an air and a hemispherical microlens arrays. After attaching a hemispherical microlens array with contact angle of 50.4° onto the OLEDs, the luminance was enhanced by approximately 117%.

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