Novel ESD device design for STT-MRAM memory chip

Abstract

An investigation of the influence of the magnetic field induced by electrostatic discharge (ESD) current on magnetic tunnel junction (MTJ) device is presented in the paper. The transient magnetic field generated by the ESD current is not considered in the traditional CMOS ESD protection strategy, which may be a reason of the degradation of the performance and the robustness of STT-MRAM. An ESD protection circuit of STT-MRAM is proposed in the paper, including the diode-based ESD devices, the filter circuit and the power clamp. Based on the waveform analysis of the three ESD standard test models, including HBM, MM and CDM, a filter circuit is added in the ESD device to decrease the influence of the high frequency components on the magnetic device. The diode-based ESD devices are integrated in the ESD structure, which is used for the ESD window of STT-MRAM for its low operating voltage. Based on the operation mechanism of the STT-MRAM, its ESD window allows a low operating voltage, thus the diode-based devices are chosen to be integrated in the ESD device. The distribution and magnitude of the magnetic field are studied in the paper. The results show that the ESD protection circuit of STT-MRAM can effectively suppress the magnetic field generated by the ESD current, hence increasing the stability of STT-MRAM. Under the influence of the HBM, MM and CDM events, the ESD disturbance probability of the MTJ device are 2.0 × 10−12, 5.8 × 10−9 and 1.1 × 10−12 respectively. The influence of the memory density and the distance between pads and memory array are also investigated in this paper. The ESD protection strategy proposed in the paper can be adopted for the future high performance STT-MRAM.