Novel designs of SAW devices for highly sensitive chemical sensors

Abstract

For the realization of highly sensitive SAW devices, three approaches have been followed. 1) Fabrication of SAW resonators such that the entire energy could be trapped in between the IDTs, to minimizethe losses and increases the sensitivity. 2) Use of high velocity DLC thin film as buffer layer to increase the resonance frequency and hence the sensitivity. 3) Fabrication of the membrane based acoustic devices, where movement of membrane along with the acoustic wave leads to a very high sensitivity. In the present work fabrication of these three type of devices has been presented in detail.