Abstract
Microfabricated semiconductor devices are becoming increasingly relevant also for (bio-)chemical sensors. The techniques will have a crucial impact in application fields such as medicine, food technology, environment, chemistry and biotechnology as well as information processing. Therefore, scientists and engineers are interested in the analytical benefits of miniaturised and microfabricated sensors. In this paper, novel concepts for silicon-based sensors are discussed: Fabrication of thin films by means of pulsed laser deposition technique; enzyme immobilisation by means of heterobifunctional cross-linking; three-dimensionally structured silicon-based chemical sensors coupled with biomolecules; and the realisation of biohybrid sensors by immobilising living cells or intact chemoreceptors to silicon transducers.
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