Abstract
Research in techniques for microfabricating semiconductor devices is becoming increasingly relevant for (bio-)chemical sensors. These rapidly advancing techniques will surely have an impact on crucial fields in analysis such as medicine, food technology, environment, chemistry and biotechnology as well as information processing. Therefore, scientists and engineers are interested in the analytical benefits of miniaturised and microfabricated sensors. In this article, novel methods of microfabrication are discussed: Fabrication of thin films by means of pulsed laser deposition technique; three-dimensionally structured silicon-based chemical sensors and biosensors due to anisotropic and anodic etching processes; and realisation of biohybrid sensors by means of coupling living cells or intact chemoreceptors to silicon transducers.
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