Abstract
This paper presents a new monolithic microwave integrated circuit (MMIC) based on coplanar waveguide (CPW) design for a tunable resonator based on RF MEMS. This RF structure, which can be used for system on chip (SOC), is constituted with MEMS Bridge placed between two meander inductors and the tenability is controlled by a variable applied DC voltage. Moreover, this device presents a compactness characteristic and the possibility to operate at high frequencies. The resonant frequency and the bandwidth can be changed easily by changing the bridge gap of the RF MEMS. The numerical simulations of this novel structure of a tunable RF MEMS resonator were performed with the electromagnetic solvers CST MWS (Computer simulation Technology Microwave Studio) and validated by the more accurate electromagnetic solver HFSS (High Frequency Structural Simulator). The simulation results, for three different spacing of the bridge gap, show that the tunable frequency band are between 10 and 40 GHz with the two electromagnetic solvers and exhibiting three resonant frequencies (21, 23.1 and 24.6 GHz).The simulation results of the return loss using CST achieves 29 dB with an insertion loss less than 1 dB; However, the HFSS simulation shows similar performance in the resonant frequencies and in the bandwidth giving better results in terms of the return loss (about 35dB instead of 29 dB) and showing a good adaptation.
Highlights
The Micro-electromechanical system (MEMS) is a mixture of mechanical and electronic elements integrated on a common substrate
The radio frequency (RF) MEMS switches present several advantages compared to the conventional semiconductor components, such as, low insertion losses, good linearity, low power consumption, very important cut-off frequency, small volume and low fabrication cost [3]
Many studies have combined both of the inductor and the capacity features [12][13]. Their propose structures technologies in [12][13] based on variable capacitor and spiral inductor are very complicated on fabrication and configuration of the tunable RF-MEMS
Summary
The Micro-electromechanical system (MEMS) is a mixture of mechanical and electronic elements integrated on a common substrate. The majority of RF MEMS are operated through electrostatic force This micro-electromechanical bridging element is employed to change the frequency. Many studies have combined both of the inductor and the capacity features [12][13] Their propose structures technologies in [12][13] based on variable capacitor and spiral inductor are very complicated on fabrication and configuration of the tunable RF-MEMS. The proposed structure of RF MEMS resonator is based on a bridge with two meander self. The presented paper falls in three parts: section I presents a design of the classical RF MEMS and the simulation results, such as, the return loss, the insertion loss at different states.
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