Abstract
Titanium oxide thin films on glass substrates were prepared by resistance evaporation method under UHV conditions, with different 13, 30 and 58 nm thicknesses in room temperature. The structural and optical properties of the films were systematically examined. The nano-structure of the films were obtained using X-ray diffraction (XRD), and atomic force microscopy (AFM) and their optical properties were measured by spectrophotometer in the spectral range of 300-1100 nm. The optical functions were obtained from the Kramers-Kronig analysis of the reflectivity curves. From X-ray diffractometric measurements (XRD), it has been conformed that the films are amorphous in room temperature. the effect of thickness on nano crystalline Titanium oxides were studied with AFM images. Band-gap energy (Eg) was also estimated for these films.
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