Abstract
We present a reliable method for aligning an electron gun which consists of an electron source and lenses by controlling a stack of rubber O-rings in a vacuum condition. The beam direction angle is precisely tilted along two axes by adjusting the height difference of a stack of O-rings. In addition, the source position is shifted in each of three orthogonal directions. We show that the tilting angle and linear shift along the x and y axes as obtained from ten stacked O-rings are ±2.55° and ±2 mm, respectively. This study can easily be adapted to charged particle gun alignment and adjustments of the flange position in a vacuum, ensuring that its results can be useful with regard to electrical insulation between flanges with slight modifications.
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