Abstract

We demonstrate a high-performance HeNe laser feedback interferometer (HLFI) based on a birefringence feedback cavity scanned by a piezoelectric transducer (PZT). The PZT scanning technique leads to a significant improvement in the HLFI's anti-jamming capability. The null drift under general laboratory conditions is approximately ±32 nm, corresponding to ±2 pulses. The phase difference between the two measurement signals does not vary when the feedback cavity length changes. This ensures a large measurement range for the HLFI. The HLFI presented here features a large measurement range (>1 m), nanometer-scale resolution (15.82 nm), a compact configuration, and low cost.

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