Abstract
Despite strong scaling limitations for both NOR and NAND Flash memories, solutions to continue the Moore's law are also emerging. For NOR Flash memory, 2-bit/cell NROM, BE-SONOS and phase-change chalcogenide memory show promise to scale below 35nm node. For NAND Flash memory, new nitride storage devices such as TANOS and BE-SONOS are candidates for < 30 nm devices.
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