Nonlinearity response correction in phase-shifting deflectometry

Abstract

Owing to the nonlinearity response of digital devices such as screens and cameras in phase-shifting deflectometry, non-sinusoidal phase-shifted fringe patterns are generated and additional measurement errors are introduced. In this paper, a new deflectometry technique is described for overcoming these problems using a pre-distorted pattern combined with an advanced iterative algorithm. The experiment results show that this method can reconstruct the 3D surface map of a sample without fringe print-through caused by the nonlinearity response of digital devices. The proposed technique is verified by measuring the surface height variations in a deformable mirror and comparing them with the measurement result obtained using a coordinate measuring machine. The difference between the two measurement results is estimated to be less than 13 µm.