Nonlinear resonance suppression method of 3D contact probe based on dynamic TSVD inversion

Abstract

High-precision measurement of 3D probe is usually inseparable from the quasi-static measurement model. However, insufficient dynamic characteristics and uncertainty of the measured characteristics make the measurement results inevitably affected by the resonance nonlinear factors in dynamic measurement. This paper proposes a nonlinear suppression method of dynamic resonance based on truncated singular value decomposition (TSVD) inversion. The dynamic time-domain response function based on the transfer function of the probe system is constructed, and the basic characteristics of nonlinear resonance response and the causes of error are revealed. Then, a piezoelectric positioning system is used to generate a wide-band dynamic excitation signal, and dynamic broadband response signals with linear and nonlinear comprehensive characteristics is inversed with high accuracy through the dynamic measurement experiment. By comparing with typical measurement methods, the advantages of the proposed method in improving dynamic measurement accuracy and suppressing resonance nonlinearity are quantitatively verified.