Nonlinear coupling of transverse modes of a fixed–fixed microbeam under direct and parametric excitation

Abstract

Tuning of linear frequency and nonlinear frequency response of microelectromechanical systems is important in order to obtain high operating bandwidth. Linear frequency tuning can be achieved through various mechanisms such as heating and softening due to DC voltage. Nonlinear frequency response is influenced by nonlinear stiffness, quality factor and forcing. In this paper, we present the influence of nonlinear coupling in tuning the nonlinear frequency response of two transverse modes of a fixed–fixed microbeam under the influence of direct and parametric forces near and below the coupling regions. To do the analysis, we use nonlinear equation governing the motion along in-plane and out-of-plane directions. For a given DC and AC forcing, we obtain static and dynamic equations using the Galerkin’s method based on first-mode approximation under the two different resonant conditions. First, we consider one-to-one internal resonance condition in which the linear frequencies of two transverse modes show coupling. Second, we consider the case in which the linear frequencies of two transverse modes are uncoupled. To obtain the nonlinear frequency response under both the conditions, we solve the dynamic equation with the method of multiple scale (MMS). After validating the results obtained using MMS with the numerical simulation of modal equation, we discuss the influence of linear and nonlinear coupling on the frequency response of the in-plane and out-of-plane motion of fixed–fixed beam. We also analyzed the influence of quality factor on the frequency response of the beams near the coupling region. We found that the nonlinear response shows single curve near the coupling region with wider width for low value of quality factor, and it shows two different curves when the quality factor is high. Consequently, we can effectively tune the quality factor and forcing to obtain different types of coupled response of two modes of a fixed–fixed microbeam.