Abstract

Cu6Sn5 intermetallic is an important compound formed during reaction between Sn-rich interconnects and copper metallization. The full elastic constants of Cu6Sn5 were quantified experimentally by Resonant Ultrasound Spectroscopy (RUS). The single crystal elastic properties were modeled by density functional theory. A mesoscale polycrystalline model, incorporating the single crystal constants was compared to the experimental results, yielding excellent agreement.

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