Abstract

Ratios of M 2,3VV Auger peak heights of gold and copper for the Au 0.6Cu 0.4 alloy expected for particular compositions of two surface atomic layers and for two incidence angles of the primary electron beam in an RFA spectrometer were calculated with the use of Monte-Carlo computer simulation of the process of Auger electron transport to the sample surface, including elastic and inelastic scattering of those electrons. Those ratios were compared with the corresponding ratios obtained experimentally which gave the relative concentration of gold atoms in the first and second atomic layers equal to 0.79 ± 0.05 and 0.60 ± 0.20, respectively.

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