Abstract
The Al and Ge molar fraction of a few surface atomic layers in AlGe binary alloys was calculated using Auger electron spectroscopy (AES) and the evaluation of the Auger electron matrix factor or the matrix correction. The electron backscattering correction factor (R) and the inelastic mean path (IMFP) were taken into account to calculate the matrix correction. The IMFP was obtained from experimental optical data and elastic peak electron spectroscopy (EPES) measurements. The electron backscattering correction factor was calculated using Monte Carlo simulations. The main sources of the uncertainty of the Al and Ge molar fraction of a few surface atomic layers in AlGe binary alloys is the uncertainty of Al IMFP.
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