Abstract
Femtosecond laser micromachining of a Zr-based amorphous alloy in air, including measuring the ablation threshold, micro-drilling and trenching, was investigated. The threshold of ablating this amorphous alloy was determined by experiment. Laser-induced ablation and associated damage were examined by means of optical microscope, scanning electron microscopy, transmission electron microscopy and electron diffraction diagram. The results show that conventional processing method induced defects in the vicinity of machined area, such as crystallization, molten trace and spatter, were absent in femtosecond laser ablation area with selected parameters. This indicates that femtosecond laser ablation is a promising method for micromachining amorphous alloys without crystallization.
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