Abstract
Femtosecond laser ablation of an amorphous alloy in air, including single-pulse ablation, multi-pulse drilling and trenching has been investigated. Laser-induced ablation and related effects were examined by means of scanning electron microscopy, energy dispersive X-ray analysis, transmission electron microscopy and electron diffraction. Oxidation was observed in the multi-pulse ablation region surface. With selected parameters, molten trace, spatter and crystallization can be avoided in the vicinity of the machining area. The results show that femtosecond laser ablation with selected parameters is a promising method for micromachining amorphous alloys.
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