Abstract
The possibility of a non-contact optical distance/displacement sensor, making use of optical intensity variations caused by optical feedback effects in laser diodes, was investigated. A compact sensor system and a simple signal processing technique were proposed to realise the sensor system. The experimental results indicated that the resolutions were of sub-mm order in distance measurements and about 40 nm in displacement measurements. The allowable maximum speed of displacement can be improved up to several cm/s. The influence of temperature variation on the measurement accuracy was discussed and the advanced sensing technique utilising a synthetic wavelength of laser diodes was proposed. These methods are applicable even to an object with rough surfaces.
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