Abstract
We measured the coefficient of linear thermal expansion of ZnSe thin films with a temperature regulated spectroscopic ellipsometer. The change in the film thickness was found to be a quadratic function of temperature whereas the coefficient of linear thermal expansion varied linearly in the temperature range between 295 and 413 K. While spectroscopic ellipsometry is recognized as a measurement technique to determine thin film optical constants and film thickness, the present work expands upon this technique to measure temperature induced dimensional change in the Å range.
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Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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