Abstract
In this study, a non-contact and quantitative evaluation method was developed to measure the conductivity of metallic nanowires at nanometer-scale resolution. Using a coaxial probe, microwave images and topographical images were simultaneously obtained for three nanowires via microwave atomic force microscopy (M-AFM). A semi-near-field model was established to describe the distribution of the electric field between the probe and the sample. Based on this model, the local conductivities of metallic nanowires on the nanometer scale were quantitatively evaluated in a single scan, using a metal strip substrate to calibrate the reflected signal.
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