Abstract
The cross section for 167° backscattering of 4He from 14N in the energy range from 4.5 to 9.0 MeV was measured. The targets were made by evaporating 500 Å of zirconium on a carbon substrate and implanting with 1.3 × 10 17 N 2/cm 2 at 33 keV. A large scattering resonance, approximately 80 times Rutherford and FWHM > 200 keV, was found at 8.81 MeV. Titanium samples were irradiated using pulsed excimer laser radiation at 248 nm in nitrogen gas at 1 atm. The nitrogen content was measured using the 14N alpha scattering resonance at 8.81 MeV. For fluences greater than 500 J/cm 2, concentrations of nitrogen approaching that of TiN were observed. The thickness of the nitride layer is on the order of 0.35 μm.
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