Non-null annular subaperture stitching interferometry for steep aspheric measurement.

Abstract

A non-null annular subaperture stitching interferometry (NASSI), combining the subaperture stitching ideal and non-null test method, is proposed for steep aspheric testing. Compared with standard annular subaperture stitching interferometry (ASSI), a partial null lens (PNL) is employed as an alternative to the transmission sphere, to generate different aspherical wavefronts as the references. The coverage subaperture number would be reduced greatly for the better performance of aspherical wavefronts in matching the local slope of aspheric surfaces. In this way, relatively large overlapping areas can be obtained for adjustment errors correction while the error accumulation would be decreased. With the reverse optimization reconstruction (ROR) method for retrace error correction, the figure error of each subaperture can be retrieved accurately. Therefore, the testing accuracy and efficiency are thus increased. The dynamic test range is extended as well. A numerical simulation exhibits the comparison of the performance of the NASSI and standard ASSI, which demonstrates the high accuracy of the NASSI in testing steep aspheric. Experimental results of NASSI are shown to be in good agreement with those of the Zygo interferometer.