Abstract
A LiNbO3 piezoelectric single crystal is expected to have superior linearity and non-hysteresis in piezoelectric performance. By optimizing the cutting angle (36°Y-cut), the thickness of the piezoelectric constant becomes as large as 38pC/N, and a multilayered structure enables the piezoelectric displacement to become larger. The effective piezoelectric coefficient becomes comparable to that of a PZT actuator. To realize an ultra-high precise positioning system, a multilayered LiNbO3 actuator was fabricated to examine the piezoelectric vibration characteristic and linearity. By investigating the relationship between applied voltage and the piezoelectric displacement, it was confirmed that this actuator had superior linearity and non-hysteresis performance. The effective piezoelectric constant was measured at 380pC/N, and the maximum displacement at 700V was more than 250nm.
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