Abstract
ABSTRACTWe performed pulsed laser ablation of titanium dioxide (TiO2) target in O2 background gas. Effects of background gas pressure and substrate target distance on the structure of deposited films are clarified. The hierarchical structures are observed when we change scale of observation. The film deposited on the substrate is composed of primary nanocrystal and secondary porous-aggregated-nanostructures. The primary nanocrystal changes from anatase to rutile phase with increasing background gas pressure or substrate target distance. The porosity of secondary aggregated structure increases with increasing background gas pressure or substrate target distance. The similarity between the effects of background gas and substrate target distance indicates that confinement of the plume between target and substrate is important for structural formation. The non-equilibrium aggregation processes of nanocrystals in the plume and on the substrate are essential for the hierarchical structure of the nanocrystal film.
Published Version
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