Abstract
An in-plane reflection intensity map indicating a dielectric map of the cross-section of a multi-layer ceramic capacitor was measured in the reflection intensity minimum position using a microwave probe at 9.4 GHz. The dielectric map showed the inner dielectric layers and electrodes of the cross-section of the multi-layer ceramic capacitor. Noise reduction for the obtained dielectric map was carried out by Fourier analysis refinement using measurement data of BaTiO3 ceramics as the parameters of the point spread function. The inner dielectric layers and electrodes of the cross-section of the multi-layer ceramic capacitor were presented clearly, and the origin of noise was elucidated as a result of the Fourier analysis refinement.
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