Abstract
Electron emission properties and noise characteristics of emission current from the conductive diamond-like carbon (DLC) thin films, coated on cone shaped Si field emitters, were investigated. The effective work function of the emitters coated by DLC thin films was found to decrease as the conductivity of the DLC film increases. To coat the DLC film, the emission current fluctuation is decreased, but the fluctuation is not influenced by the conductivity of the DLC film. Flicker noise of the field emission current from these emitters was analyzed using fast Fourier transform. It was found that the noise power density of the DLC coated emitters is about 10 dB lower than that of Si field emitters and the flicker noise of the DLC coated field emitters is not influenced by the ambient pressure.
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More From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
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