Abstract
The explosive limit of methane (CH4) gas concentration is 5%. However, detection of CH4 gas at lower concentrations is essential for prevention and warning purposes in leaking gas systems. In this study, a simple method for fabricating thin films of granular indium oxide (In2O3) particles decorated with nickel oxide (Ni2O3) nanoparticles was developed for high response CH4 gas sensor. The In2O3 granular film was fabricated by sputter deposition of indium, followed by oxidation. Ni2O3 nanoparticles were deposited onto the In2O3 film by arc-discharge deposition of single-wall carbon nanotubes (SWCNTs) with Ni catalyst nanowires, followed by burning the carbon nanotubes. The Ni nanoparticle catalysts deposited on the SWCNTs were then oxidized to Ni2O3.The Ni2O3 nanoparticles on the surface exhibited a catalytic role in methane gas reactions, resulting in reduction of operation temperature. The sensors showed relatively high response percentage per 100 ppm methane gas concentration.
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