Abstract
In the paper, a new type small-angle sensor based on the surface plasmon resonance (SPR) Technology in heterodyne interferometry (HI) is proposed. The sensing unit is a prism assembly that is composed of a half-wave (λ/2) plate, two right-angle prisms and two rotation stages. As a heterodyne optical source passes through this experimental structure, we can achieve the small rotation angle only by measuring the variation in phase difference between p- and s-polarizations. The resolution of the system can approximately reach 1.06×10−8 radian at least. The new instrument has some merits, e.g., easy operation, high measurement accuracy, high resolution and rapid measurement, etc.
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