Abstract
This paper presents the characteristics of a new generation of temperature multifunction sensors based on germanium‐film resistance thermometers deposited on a semi‐insulating GaAs substrate: as dual‐range thermometers (dual‐element resistance thermometer —DERT) or for concurrent measurements of temperature and magnetic field, using a InSb‐film Hall generator (dual function sensors —DFS). They have been developed using micro‐electronic design and production methods, in an international collaboration (INTAS) supported by the European Union. A range of resistance thermometers is described, providing, for scientific and industrial use, high sensitivity over complementary temperature ranges, within the overall range from 0.03 to 500 K, in a number of different packages. The multisensors are intended for use in the 0.3 K to 400 K temperature range, for magnetic field up to 30 T and to be resistant to ionizing radiations.
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