Abstract
Dual function sensors (DFSs) for concurrent measurement of temperature and magnetic field in cryogenic applications have been developed and characterized. The DFS consists of a Ge-on-GaAs film resistance thermometer and an InSb-on-GaAs film Hall-effect magnetic field sensor combined in a single package with dimensions: 3.5 mm wide, 2.2 mm thick and 10.1 mm long. The construction and characteristics of two models of the DFSs; which are intended to provide measurements of temperature in the 1.5–400 K and 0.1–400 K ranges, and magnetic fields up to 30 T, are presented.
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