Abstract
We have created new applications of experimental instrumentation for diagnostics of hot plasma and studies of interaction of multicharged ion beams with matter (atoms, ions, molecules, microstructures, surfaces, solids) based on both glass capillary devices and multilayer mirrors or crystals, where glass capillary devices provide guiding, focusing and polarization analysis of short wavelength radiation with a large bandwidth, and multilayer mirrors or crystals optical elements are used for dispersing, focusing and polarization sensitive studies of radiation within a narrow bandwidth. In particular we report here about the development and test of such optical diagnostic devices for the spectral range 0.1 nm < λ < 100 nm. This type of micro-instrumentation is very suitable also for 2D, 3D and multiparameter applications.
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