Development of x-ray and extreme ultraviolet (EUV) optical devices for diagnostics and instrumentation for various surface applications

Abstract

New methods of surface-sensitive instrumentation for the diagnostics of extreme ultraviolet (EUV), soft x-ray (SXR) and x-ray radiation have been developed. In particular, these methods of instrumentation are of great importance for studies of the interaction of electron, ion and photon beams with matter (atoms, molecules, ions, clusters, surfaces, micro- and submicron structures). Such collision studies are based on both glass capillary converters (GCCs) and multilayer mirrors (MLMs), gratings and crystals. The optical GCC device provides guiding, focusing and polarization analysis of short-wavelength radiation with a large bandwidth, and the MLM, grating and crystal optical elements are used for dispersing, focusing and polarization-sensitive studies of radiation within a more narrow bandwidth. In particular, we report here on the development of optical diagnostic devices, such as very compact EUV and SXR spectrometers, for measurements of polarization and spectral characteristics of short-wavelength radiation. Our high-throughput and high resolution compact spectrometers for the SXR range are based on grazing incidence spectrometers, MLMs and a sliced multi-layer grating (SMG) novel type of dispersion element. Furthermore, we will utilize a Schwarzschild objective with a spatial resolution of ∽0.1–0.3 μm for imaging surfaces following ion–surface interaction. Copyright © 1999 John Wiley & Sons, Ltd.