Abstract

Current “Non-evaporable getters” (NEGs) are important for the improvement of vacuum by the help of metallic surface sorption of residual gas molecules. High porosity alloys or powder mixtures of Zr, Ti, Al, V, Fe and other metals are the base material for this kind of gas sorbents. The development of vacuum technologies creates new challenges for the field of getter materials. The main sorption parameters of the current NEGs, namely, pumping speed and sorption capacity, have reached certain level limits. Chemically active metals are the basis of NEGs of a new generation. The appearance of new materials with high sorption capacity at room temperature is a long-felt need. It is obvious, that chemically active metals and alloys with reactivity higher, than that of transition metals, can become this kind of materials. The potential of active metals as the strongest gas sorbents is very high. The improved getter materials allow faster pumping speed. The sticking rate on the chemically active surface is significantly higher, and sorption capacity can be increased by up to 104 times (during the life-time of a device the entire getter material reacts with residual gases). The main structural form of the new getter concepts are spherical powders, granules and porous multi-layers. The full pumping performance takes already place at room temperature and the activation temperature can be adjusted between room temperature and 660 °C. The successful insertion of this new chemical getter pump in a mobile double-walled LH 2 tank system shows the very high sorption capacity of all relevant residual gases including H 2. This new invention opens the possibility for significant vacuum improvements especially in the field of H 2 pumping, which is an important challenge in many different vacuum devices and processes.

Full Text
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