Abstract
New FM demodulation techniques capable of detecting the fast frequency deviation of a cantilever of a noncontact atomic force microscope are proposed and their features were demonstrated by experiments. The techniques entail the frequency conversion of an input FM signal to a pair of zero-Hz-centered signals with a mutual phase difference of 90 deg, differentiation or Hilbert transformation, multiplication and subtraction. Since the center frequency and scale factor are determined by different processes, a high sensitivity, a fast response and a precise center frequency are achievable at the same time. The developed circuitry is capable of detecting a minimum frequency shift of 0.1 Hz. The maximum response bandwidth is 100 kHz.
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