Abstract

Over the last decade, optical fiber-based forms of microscopy and endoscopy have extended the realm of applicability for many imaging modalities. Optical fiber-based imaging modalities permit the use of remote illumination sources and enable flexible forms supporting the creation of portable and hand-held imaging instrumentations to interrogate within hollow tissue cavities. A common challenge in the development of such devices is the design and integration of miniaturized optical and mechanical components. Until recently, microelectromechanical systems (MEMS) sensors and actuators have been playing a key role in shaping the miniaturization of these components. This is due to the precision mechanics of MEMS, microfabrication techniques, and optical functionality enabling a wide variety of movable and tunable mirrors, lenses, filters, and other optical structures. Many promising results from MEMS based optical fiber endoscopy have demonstrated great potentials for clinical translation. In this article, reviews of MEMS sensors and actuators for various fiber-optical endoscopy such as fluorescence, optical coherence tomography, confocal, photo-acoustic, and two-photon imaging modalities will be discussed. This advanced MEMS based optical fiber endoscopy can provide cellular and molecular features with deep tissue penetration enabling guided resections and early cancer assessment to better treatment outcomes.

Highlights

  • Cancer is the second most common cause of death in the US, exceeded only by heart disease, and accounts for nearly one of every four deaths [1]

  • With the invention of microelectromechanical systems (MEMS) sensors and actuators technology, these microfabricated components have become a cornerstone in creation of optical fiber based endoscopy as MEMS components have an unmatched ability to incorporate numerous functionalities into ultra-compact forms [6,7]. Those functionalities are scanning mirrors, filters, lenses, translation stages, wave guides, etc. Those MEMS based components with optical fibers can be integrated into optical imaging modalities such as optical coherence tomography [8,9], confocal microscopy [10], multiphoton microscopy [11–13], and photoacoustic [14] and transform those modalities into endoscopic forms which are capable of providing in vivo real-time imaging with cellular resolutions approaching of those microscopy techniques

  • This review presents the current progresses and challenges in MEMS sensors and actuators for various optical fiber endoscopy

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Summary

Introduction

Cancer is the second most common cause of death in the US, exceeded only by heart disease, and accounts for nearly one of every four deaths [1]. Current cancer screening techniques involve the use of white light microscopy to screen for tissue abnormalities While this process has been the standard of care for several decades, there are significant limitations that include processing artifact, sampling error, time consumption, and interpretive variability. Those MEMS based components with optical fibers can be integrated into optical imaging modalities such as optical coherence tomography [8,9], confocal microscopy [10], multiphoton microscopy [11–13], and photoacoustic [14] and transform those modalities into endoscopic forms which are capable of providing in vivo real-time imaging with cellular resolutions approaching of those microscopy techniques Those endoscopy techniques are often combined with biomarkers targeting cancerous tissues [15,16] to help enhance diagnosis performance. This review presents the current progresses and challenges in MEMS sensors and actuators for various optical fiber endoscopy

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MEMS Scanner and Actuator for Confocal Ennddoommiiccrroossccooppee
MEMS Tunabllee LLeennss
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