Abstract
Over the past 30 years, significant progress has been made in the fields of Micro-Electro-Mechanical Systems (MEMS). Originally, the term MEMS was used in the United States to signify electromechanical sensors and actuators that are based on semiconductors. In Europe, the same technology was referred to as “Microsystem Technology,” while in Japan the term micromechatronics was used. Today, the term MEMS refers to all devices, sensors, and actuators that have dimensions in the micrometer range, whether based on semiconductors or other materials such as glass and metals. In this chapter a brief review of the history is provided followed by future trends in the Micro-electro-mechanical Systems (MEMS) industry. We further present materials that are commonly used in the fabrication of MEMS sensors and actuators and we discuss the advantages and disadvantages of each material. Finally, the different types, applications, and recent technologies in MEMS sensors and actuators constitute the core of this chapter.
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